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159 lines
5.6 KiB
R
159 lines
5.6 KiB
R
# LEO1550.R
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# Functions to read and manipulate data from the LEO1550 scanning electron microscope
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# Taha Ahmed, March 2011
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# CONTENTS
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source("/home/taha/chepec/chetex/common/R/common.R")
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# >>>> tifftags2df
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##################################################
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################ tifftags2df #####################
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##################################################
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tifftags2df <- function(tiffimage) {
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## Description:
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## Extracts all tags from a TIFF image file
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## using the tiffinfo tool and stores
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## a selection of the tags in a dataframe.
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## Usage:
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## tifftags2df(fulltiffpath)
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## Arguments:
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## tiffimage: character string, the full filename
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## (with path) to one TIFF file.
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## Value:
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## A dataframe with three columns:
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## sampleid, parameter, value.
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#
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substrate.id <- strsplit(basename(tiffimage), "\\.")[[1]][1]
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tifftags <- system(paste("tiffinfo", tiffimage, sep = " "),
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intern = TRUE, ignore.stderr = TRUE)
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# The first 47 rows of tifftags contains info about
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# the image itself, and is not interesting
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# The last row of tifftags is the empty string
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trimtags <-
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sub("[ ]+$", "", #trim trailing spaces, if any
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sub("\\r$", "", #remove trailing \r
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gsub("\\xb9", "", #remove special character
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gsub("\\xb8", "", #remove special character
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gsub("\\xb7", "", #remove special character
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gsub("\\xb6", "", #remove special character
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gsub("\\xb5", "", #remove special character
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gsub("\\xb4", "", #remove special character
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gsub("\\xb3", "", #remove special character
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gsub("\\xb2", "", #remove special character
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gsub("\\xb1", "", #remove special character
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gsub("\\xb0", "", tifftags[48:length(tifftags) - 1],
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useBytes=T),
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useBytes=T),
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useBytes=T),
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useBytes=T),
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useBytes=T),
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useBytes=T),
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useBytes=T),
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useBytes=T),
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useBytes=T),
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useBytes=T)))
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oddtags <- trimtags[seq(1, length(trimtags), by = 2)]
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eventags <- trimtags[seq(2, length(trimtags), by = 2)]
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tmp.tagsdf <-
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data.frame(stringsAsFactors = FALSE,
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sampleid = substrate.id,
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tag = oddtags,
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value = eventags)
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# A vector of displayed tags
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displaytags <-
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c("AP_ACTUALKV", # EHT = 5.00 kV
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"DP_HIGH_CURRENT", # High Current = Off # commonly used for EDS analysis
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"AP_WD", # WD = 4.1 mm
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"AP_MAG", # Mag = 15.00 K X
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"AP_BRIGHTNESS", # Brightness = 49.0 %
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"AP_CONTRAST", # Contrast = 32.4 %
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"DP_DETECTOR_CHANNEL", # InLens
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"DP_SCM_STATUS", # SCM Status = Off
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"AP_SCM", # Specimen I = 0 fA # zero if SCM Status = Off
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# Beam
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#notrelevant#"AP_ACTUALCURRENT", # Fil I = 2.370 A
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"AP_STIG_Y", # Stigmation Y = -0.2 %
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"AP_STIG_X", # Stigmation X = 1.9 %
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"AP_APERTURE_ALIGN_Y", # Aperture Align Y = -1.5 %
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"AP_APERTURE_ALIGN_X", # Aperture Align X = -2.4 %
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"AP_APERTURESIZE", # Aperture Size = 30.00 m
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"AP_BEAMSHIFT_Y", # Beam Shift Y = 0.1%
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"AP_BEAMSHIFT_X", # Beam Shift X = 0.1%
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#notrelevant#"AP_BEAM_OFFSET_Y", # Beam Offset Y = 13.89 nm
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#notrelevant#"AP_BEAM_OFFSET_X", # Beam Offset X = 9.13 nm
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# Stage
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"DP_TRACK_Z", # Track Z = On
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"AP_STAGE_AT_Z", # Stage at Z = 25.857 mm
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"AP_STAGE_AT_Y", # Stage at Y = 49.0708 mm
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"AP_STAGE_AT_X", # Stage at X = 50.0753 mm
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# Tilt
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"DP_STAGE_TILTED", # Stage Tilt = In Y
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"AP_TILT_ANGLE", # Tilt Angle = 0.0
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"AP_TILT_AXIS", # Tilt Axis = 0.0
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# Image
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"DP_SCANRATE", # Scan Speed = 10
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"AP_FRAME_TIME", # Cycle Time = 48.7 Secs
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"DP_FREEZE_ON", # Freeze on = End Frame
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"DP_DWELL_TIME", # Dwell time = 100 ns
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"DP_NOISE_REDUCTION", # Noise Reduction = Pixel Avg.
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"AP_FRAME_INT_COUNT", # Frames to integrate = 0
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"AP_FRAME_AVERAGE_COUNT", # Frames to average = 1
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#notrelevant#"AP_PROFILE_W", # Profile Width = 71.79 m
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"AP_PIXEL_SIZE", # Pixel Size = 23.96 nm
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# System
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"AP_COLUMN_VAC", # Gun Vacuum = 1.74e-009 mbar
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"AP_SYSTEM_VAC", # System Vacuum = 2.32e-006 mbar
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"AP_FILAMENT_AGE", # Filament Age = 1378.35 Hours
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# Misc
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"AP_PHOTO_NUMBER", # Photo No. = 9069
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"AP_DATE", # Date :23 Mar 2011
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"AP_TIME") # Time :19:10:46
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#
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extracted.tagsdf <- data.frame()
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for (i in 1:length(displaytags)) {
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rows.extract <- which(displaytags[i] == tmp.tagsdf$tag)
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extracted.tagsdf <- rbind(extracted.tagsdf,
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data.frame(stringsAsFactors = FALSE,
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tmp.tagsdf[rows.extract, ]))
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}
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# Fix split of time and date fields
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splittags <- strsplit(extracted.tagsdf$value, " = ")
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for (i in 1:length(splittags)) {
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if (length(splittags[[i]]) == 1) {
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splittags[[i]] <- strsplit(splittags[[i]], " :")[[1]]
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}
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}
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tagsdf <- data.frame()
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for (i in 1:length(splittags)) {
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tagsdf <- rbind(tagsdf,
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data.frame(stringsAsFactors = FALSE,
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sampleid = extracted.tagsdf$sampleid[i],
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parameter = splittags[[i]][1],
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value = splittags[[i]][2]))
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}
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#
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return(tagsdf)
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}
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